29. Thermal Atomic Layer Etching of Molybdenum Using Sequential Oxidation and Deoxychlorination Reactions
Taewook Nam, Troy A. Colleran, Jonathan L. Partridge, Andrew S. Cavanagh, and Steven M. George
Chemistry of Materials, 2024, 36, 3, 1449–1458. [Link]
28. Atomic Layer Deposition of Pt Nanoparticles Using Dimethyl (N, N‑dimethyl-3-butene-1-amine‑N) Platinum and H2 Reactant and Its Application to 2D WS2 Photodetectors
Dain Shin, Inkyu Sohn, Donghyun Kim, Jaehyeok Kim, Taewook Nam, Youngjun Kim, Jusang Park, Tatsuya Nakazawa*, Seung-min Chung*, and Hyungjun Kim*
Journal of Vacuum Science and Technology A 42, 012405 [Link]
2023
27. Thermal Atomic Layer Etching of Zinc Sulfide Using Sequential Trimethylaluminum and Hydrogen Fluoride Exposures: Evidence for a Conversion Mechanism
Taewook Nam, Jonathan L. Partridge, and Steven M. George
Chemistry of Materials, 2023, 35, 6671-6681 [Link]
2021
26. Growth Mechanism and Electrical Properties of Tungsten Films deposited by Plasma-enhanced Atomic Layer Deposition with Chloride and Metal
Yujin Lee, Seunggi Seo, Taewook Nam, Hyunho Lee, Hwi Yoon, Sangkyu Sun, Il-Kwon Oh, Sanghun Lee, Jin Hyung Seo, Jang Hyeon Seok, and Hyungjun Kim
Applied Surface Science, Volume 568, 1 December 2021, 150939[Link]
25. Hydrogen Barrier based on Chemical Trappingusing Chemically–modulated Al2O3grown byAtomic Layer Deposition for InGaZnO ThinFilm Transistor
22. (Invited Paper) (Selected as a Featured Article) “Atomic Layer Deposition of a Uniform Thin Film on 2-dimensional Transition Metal Dichalcogenides”
Taewook Nam, Seunggi Seo, and Hyungjun Kim
Journal of Vacuum Science and Technology A, 38, 030803 (2020) [Link]
21. “Comparative Study on Atomic Layer Deposition of HfO2 via Substitution of Ligand Structure with Cyclopentadiene“